Pocket Milling Machine - Fab Central

Pocket Milling Machine - Fab Central

and a decompressor his picture. Pocket Milling Machine Ultra-high speed micro milling machine Motivation A means to build micro structures using conventional machining techniques

Portable machine tool Applications - milling microfluidic circuits ranging from 50 microns and above with varied channel geometries in a varity of materials Functional Requirements Precision XYZ micro-manipulator Range : 20mm by 20 mm by 10mm Resolution : sub-micron (100nm) High stiffness in Z Close loop control High speed machine spindle (data point - a dentist drill runs at 300,000 rpm)

Small pocket size Modules Micro-manipulation XYZ 3DOF Stage High speed spindle design for very high rpm Focused-Ion beam milled micro tools, with specific geometries QuickTime and a TIFF (Uncompressed) decompressor are needed to see this picture.

Controls - end point close loop control Strategies - XYZ stage Functional Requirements DPs Analysis Serial Motion amp. Flexures,

Piezos 3 axis Large stroke nm- resolution (100nm)

Parallel Motion amp. Flexures, Piezos Hybrid Motion amp. Flexures, Piezos Kinematics FEA

Modal analysis Measured range CMM Risks Serial Large package Errors accumulate High inertia Parallel Coupled motion

Control difficult Motion amp unreasonable size low stiffness Countermeasures Concept - Low profile compliant mechanism based Z stages Dobule loop bridge type hinge actuator

Reported amplification = 30 Buckling sheet Z stage Low Z stiffness in the structure

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