Equipment Performance Standards Integration

Equipment Performance Standards Integration

SEMICON West 2006 STEP Methods to Measure/Improve Equipment Productivity SEMI Equipment Performance Standards Integration Sal DiIorio Semi-Tech Group [email protected] Equipment Performance Metrics Process Factory sources (automated and/or human) provide the inputs Standards define the process and equations Metrics are output consistently Same meaning for all metrics regardless of location Factory Data 2 Julu 12, 2006 SEMI Standard SemiCon West 2006 Metrics Factory Data Sources

Automated Systems Production data, state history Equipment Maintenance and state history Equipment Cell Controllers Equipment E116 or E58 state information Non-automated Systems Manual state change histories Manual input to support E58 Other state and history logs 3 Julu 12, 2006 SemiCon West 2006 Eq. Performance Standards Relationship Equipment Driven Data E79 OEE E116 EPT

E10 E35 RAM COO E58 E124 ARAMS OFE 4 Julu 12, 2006 SemiCon West 2006 E10 RAM Central to all Equipment Metrics Standards First developed in 1986 and continuously improved to meet new requirements of the semiconductor industry Defines the basic equipment states and metrics which act as input to other performance metrics E79 Overall Equipment Efficiency E35 Cost of Ownership E124 Factory Level Productivity

5 Julu 12, 2006 SemiCon West 2006 E10 Process MES CMMS Data Logs E10 State Logic E10 RAM E116 E58 Data 7 Julu 12, 2006 SemiCon West 2006 Availability Uptime Utilization MTBFp

MTTR TFR CT-RAM E116 Process E116 State Data E10 State Data E10 State Logic MES I nput 8 Julu 12, 2006 SemiCon West 2006 Mapping the States NON-SCHEDULED (MES) AND ANY STATE* (EPT) MANUFACTURING (MES) AND BLOCKED (EPT) ENGINEERING (MES) AND BLOCKED (EPT) UNSCHEDULED DOWN (MES) AND ANY STATE* (EPT)

E10 States NON-SCHEDULED TIME UNSCHEDULED DOWNTIME SCHEDULED DOWNTIME SCHEDULED DOWN (MES) AND ANY STATE* (EPT) ENGINEERING TIME STANDBY TIME ENGINEERING (MES) AND BUSY (EPT) ENGINEERING (MES) AND IDLE (EPT) MANUFACTURING (MES) AND IDLE (EPT) MANUFACTURING (MES) AND BUSY (EPT) 9 Julu 12, 2006 SemiCon West 2006 PRODUCTIVE TIME *ANY STATE (EPT) means that the EPT state is not a factor in

determining the E10 state. E58 Process E58 State Data E58 External I nput 10 Julu 12, 2006 SemiCon West 2006 E10 State Data E58 vs. E10 State Examples Equipment tracks its own E58 state... But it doesnt know its own E10 state details User input is required, in order to provide accurate data E10 State Productive Standby Engineerng

11 Julu 12, 2006 E58 State 1000 1100 1200 1300 1400 2000 2100 2200 2300 2400 3000 3100 3200 Comment Default Productive Regular Production Production for third party Production for rework Production for Engineering Default Standby No operator No product for production No support tool Associated cluster module down Default Engineering

Process Experiments Equipment Experiments SemiCon West 2006 E58 How it works Information exchange MES regarding equipment downtime state and material type. Host Computer Metric s 12 Julu 12, 2006 Operator input to trigger E58 state changes. E58 state transition Event reports. Equipment

Host input to trigger E58 state changes. SemiCon West 2006 Now that we have E10 Metrics, what do we do with them? E79 OEE E116 Continuous Improvement Activities EPT E35 E10 COO RAM E58 ARAMS E124 OFE

13 Julu 12, 2006 SemiCon West 2006 Lean Mfg TPM RCM 6 Sigma Rel Eng Etc. Using E10 Metrics Use them in purchase acceptance specifications MTBFp, Uptime, MTTR, etc. Monitor our own performance and drive continuous improvement activities Look for improvements in metrics when new procedures or processes are implemented. Benchmarking functions with other companies or between factories Use them as inputs to other SEMI Standards for a better understanding of equipment COO or productivity 14 Julu 12, 2006

SemiCon West 2006 SEMI E35 COO COO = The full cost of embedding, operating, and decommissioning in a factory environment equipment needed to accommodate the required volume of production units. Among the many inputs used by E35, two come from E10 Operational Uptime E10 metrics (MTBF, MTTR) to calculate maintenance labor hours required for scheduled and unscheduled downtime 15 Julu 12, 2006 SemiCon West 2006 E79 OEE OEE calculations are stated in terms that are consistent with SEMI E10. OEE = Availability Efficiency x Operational Efficiency x Rate Efficiency x Quality Efficiency Where E10 directly provides the values for: Availability Efficiency = Equipment Uptime / Total Time Operational Efficiency = Production Time / Equipment Uptime Rate Efficiency = Theoretical Production Time for Actual Units / Production Time Quality Efficiency = Theoretical Production Time for Effective Units / Theoretical Production Time for Actual Units

Notes: Production Time is not defined in E10, but happens in Productive Time. Rate Efficiency x Operational Efficiency = Performance Efficiency 16 Julu 12, 2006 SemiCon West 2006 The Relationship Between OEE and E10 Total Time Availability Efficiency Non-Scheduled Time Unworked shifts, days Installation, modification rebuild, or upgrade Off-line training Shutdown/Startup Downtime Julu 12, 2006 Uptime Unscheduled Downtime

Scheduled Downtime Engineering Time Maintenance delay Repair time Change of consumables/ chemicals Out of spec input Facilities related Maintenance delay Production tests Preventive maintenance Change of consumables chemicals Setup Facilities related Process experiments Equipment experiments Rate Efficiency 17 Operational Efficiency Operations Time Not specified in

SEMI E10 but occurs during Productive Time SemiCon West 2006 Manufacturing Time Software qualification Productive Time Regular production Work for 3rd party Engineering runs Rework Scrap Standby Time No operator No product No support tool Associated cluster module down Quality Efficiency E79 Process E10 Times Uptime, Productive Time,

Total Time E79 Other Data: Theoretical Production Time, Units produced, etc. In addition to OEE several other efficiencies are also defined to enable users to assess more specific aspects of equipment productivity. Other data can come from MES or other Factory sources. 18 Julu 12, 2006 OEE Ref erence OEE Engineering OEE Value-Added I n-Process OEE Production Eqpt Efficiency Demand Equipment Efficiency I ntrinsic Eqpt Efficiency

Rate Efficiency Quality Efficiency SemiCon West 2006 What is needed to determine E10 State? 20 State Data Needed Unscheduled Downtime Start/stop (duration) of unscheduled downtime Reason for failure (equipment/non-equipment dependent failures) Scheduled Downtime Start/stop (duration) of scheduled downtime Reason for downtime Engineering Start/stop (duration) of engineering work Type of engineering work

Productive Start/stop (duration) of actual productive time Manufacturing state of equipment Type of units run Standby Start/stop (duration) of idle time Units or support equipment available Linked equipment down CIM system providing input Julu 12, 2006 SemiCon West 2006 What is needed to calculate E10 Metrics? Metric Data Needed MTBFp # of failures that occurred while in or while trying to transition to productive state Productive Time Reason for failure (equipment/non-equipment dependent failures) E-MTBFp

21 MTTR E-MTTR # of failures (equipment/non-equipment dependent failures) Duration of Unscheduled Downtime Operationa l Uptime Uptime (Productive Time + Standby Time + Engineering Time) Operations Time (Total Time Non-Scheduled Time) Equipment Dependent Uptime Uptime All Maintenance-Delay Time (waiting for parts, people, etc.) Facilities-Related Downtime (scheduled and unscheduled) Out-of-Spec Input (consumables, chemicals, test results, etc.) Julu 12, 2006

SemiCon West 2006 Automation vs. Manual Data Collection 22 What data do people capture best? What data do people capture worst? Transition to and from SCHEDULED DOWNTIME NON-SCHEDULED time Reason for Failures Equipment dependent vs. non-equipment dependent Transition and reasons for Maintenance Delay Julu 12, 2006 SemiCon West 2006

Transition from STANDBY to PRODUCTIVE Transition from PRODUCTIVE to STANDBY Transition to UNSCHEDULED DOWNTIME Wafer/Cycle Counts Failures Cluster Tool Module level states Automation vs. Manual Data Collection 23 What data does automation capture best? What data does automation capture worst? Transition from STANDBY to PRODUCTIVE Transition from PRODUCTIVE to STANDBY Transition to UNSCHEDULED

DOWNTIME Wafer/Cycle Counts Failures Cluster Tool Module level states Julu 12, 2006 SemiCon West 2006 Transition to and from SCHEDULED DOWNTIME NON-SCHEDULED time Reason for Failures Equipment dependent vs. non-equipment dependent Transition and reasons for Maintenance Delay Is automation absolutely necessary? Automation is superior for the following: Accurate data regarding Productive / Standby time

More accurate OEE Operational Efficiency values Accurate data about cluster tool module level state Essential for CT RAM and CT OEE metrics Accurate quantitative data about units processed and other parametric data for scheduling maintenance. Some level of automation is absolutely preferable, even if limited. 24 Julu 12, 2006 SemiCon West 2006 Do we really need automation? Yes, primarily if: Detailed information is absolutely required. CT RAM and OEE metrics The cost of implementing and supporting automation can be justified. Full automation requires large investments in HW, SW and IT and is never done; it continually needs updates and ongoing commitment of resources (people and $$$). Lesser degrees of automation can provide significant improvements in data accuracy. MES and CMMS (CIM) systems provide excellent sources for E10 data.

25 Julu 12, 2006 SemiCon West 2006 What if full automation is not possible? Equipment level E10 metrics can be maintained. Daily and Weekly summaries can be analyzed. Look for changes and trends Equipment to equipment Time period to time period Simple OEE metric may be possible. Even if detailed rate and quality data are not available COO calculations are still meaningful. 26 Julu 12, 2006 SemiCon West 2006 Conclusions SEMI equipment performance metrics standards work together to provide meaningful information about the RAM, utilization, productivity, and COO of semiconductor equipment. While high levels of automation are required for the most accurate data and many detailed metrics,

manual data can still provide useful information. For newer, multi-billion dollar factories the return provided by small increases in productivity may quickly exceed the cost of automation. Older, smaller factories can achieve meaningful results with less automation, as long as absolute accuracy is not needed. 27 Julu 12, 2006 SemiCon West 2006

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